Basic Info.
Model NO.
TN-PLZ180-II-DC-Q
From Sample Stage to Target Surface
20~35mm Height Adjustable
Chamber Size
Diameter 180mm * 200mm
Chamber Material
High Purity Quartz
Mechanical Pump
Rotary Vane Pump
Vacuum Measurement
Resistance Gauge
Opening Mode
Top Cover Removable
Power Supply
AC;220V 50/60Hz
Transport Package
Wooden Box
Specification
570mm * 450mm * 500mm
Production Capacity
220/Month
Product Description
Lab 2 Inches Dual Target Plasma Sputtering Coater with Optional Mass Flow Meter for coating metallic materials
Product Description
Three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 target heads according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. The instrument adopts touch screen control, which is simple and intuitive to use. It can realize the operation of coating start and stop, switch target head position and baffle rotation with one button, which is very suitable for laboratory purchase.
This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, you can contact the technician to select the molecular pump group to form a high vacuum system.
Application of three target heads plasma sputtering coater:It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.
Product Parameters
Product model | TN-PLZ180-III-DC-Q |
Sample stage | Size | 100mm |
Distance from sample stage to target surface | 20~35mm height adjustable |
Rotating speed | / |
Heating temperature | / |
Temperature control accuracy | / |
Plasma sputtering source | Quantity | 2 inches * 2 |
Cooling method | Natural cooling |
Vacuum chamber | Chamber size | φ180mm * 200mm |
Observation window | Omnidirectional visibility |
Chamber material | High purity quartz |
Open method | Top cover removable |
Upper and lower cover material | 304 stainless steel |
Pumping port | KF16 |
Intake port | 1/4 inch ferrule connector |
Power configuration | Quantity | DC power supplyx1 |
Output power | Max. 150W |
Sputtering power | 1200V |
Max. sputtering current | 50mA |
Vacuum system | Vacuum pump type | Dual-stage rotary vane vacuum pump |
Pumping port | KF16 |
Exhaust interface | KF16 |
Pumping rate | 1.1L/s(4m3/h) |
Ultimate vacuum | ≥0.1Pa |
Vacuum measurement | Resistance vacuum gauge |
Others | Power supply | AC 220V 50Hz |
Total power | 1.5kW/2kW |
Dimension | 570mm * 450mm * 500mm |
Weight | 30kg |
Detailed Photos
Company Profile
FAQ
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price. Q. How is your company's product after-sales service system? A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues. Q. How long is your delivery time? If I want to customize the instrument, how long does it take? A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument. Q. Our country's power supply and plug are different. How do you solve it? A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries. Q. How to pay? A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee. Q. How is the package of goods? Delivery methods? A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way. More questions, please contact me.
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